催化热氢化法制备三氯氢硅研究进展
黄韬,唐思扬,刘颖颖,周齐领,尹渠军,梁斌
Recent advance in catalytic thermal hydrogenation technologies for trichlorosilane production
Huang Tao, Tang Siyang, Liu Yingying, Zhou Qiling, Yin Qujun, Liang Bin
工业催化
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2015, (1): 8
-14
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DOI: 10.3969/j.issn.1008-1143.2015.01.002